Full specifications
| Model Number | NM-EFP1A |
|---|---|
| Cleaning Method | Parallel plate RF back-sputtering method |
| Gas for electrical discharge | Ar [option: O2] |
| Substrate dimensions | L 50 x W 20 to L 250 x W 75 incl. S type option; L 50 x W 20 to L 330 x W 120 incl. M type option |
| Substrate thickness (mm) | 0.5 to 2.0 |
| Pneumatic Source | 0.49MPa or more, 6.5L/min [A.N.R.] |
| Power Source | 1-phase AC 200V, 2.00kVA [Full Load 5.00kVA]*Compatible with 1-phase 208/220/230/240 V |
| Dimensions (mm) / Mass | W 930 x D 1100 x H 1450 / 555kg; W 1764 x D 1100 x H 1450 / 850kg incl. S type option; W 1764 x D 1100 x H 1450 / 770kg incl. M type option*Tolerance of equipment dimensions is ±5mm, Touch panel and condition lamp is not included. Mass varies depending on configuration. |
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